Plasma cleaning machine (Diener Germany) Zepto RIE
Features and Applications:
● Compact – portable, versatile, and cost-effective – perfect for your lab.
● The 2.6-liter, low-cost plasma laboratory system ZEPTO features manual and basic PC control and is primarily designed for applications such as small-batch production, analysis (SEM, TEM), medical engineering, sterilization, R&D, archaeology, textile technology, and plastics technology.
Specifications:
● Semi-automatic MHz
● Dimensions:Width:425 mm, Height:310 mm, Depth:450 mm
● Power supply:230V | 16A
● Vacuum chamber:Aluminum circular with lid, Ø:190 mm, Height:60 mm, Volume:approximately 1 liter
● Gas supply:2 x needle valves
● Generator:13.56 MHz | Power output:0-200W
● Electrode:Electrode in empty chamber - Ø:up to 160 mm for 6" wafers
● Control unit:Semi-automatic control unit
● Power supply:230V | 50-60 Hz
● Pressure measurement:Pirani
● Pump:Minimum suction force:3 cubic meters/hour
Brand:Diener / Germany, CE