Features and Applications：

● Compact – portable, versatile, and cost-effective – perfect for your lab.

● The 2.6-liter, low-cost plasma laboratory system ZEPTO features manual and basic PC control and is primarily designed for applications such as small-batch production, analysis (SEM, TEM), medical engineering, sterilization, R&D, archaeology, textile technology, and plastics technology.

Specifications：

● Semi-automatic MHz

● Dimensions：Width：425 mm, Height：310 mm, Depth：450 mm

● Power supply：230V | 16A

● Vacuum chamber：Aluminum circular with lid, Ø：190 mm, Height：60 mm, Volume：approximately 1 liter

● Gas supply：2 x needle valves

● Generator：13.56 MHz | Power output：0-200W

● Electrode：Electrode in empty chamber - Ø：up to 160 mm for 6" wafers

● Control unit：Semi-automatic control unit

● Power supply：230V | 50-60 Hz

● Pressure measurement：Pirani

● Pump：Minimum suction force：3 cubic meters/hour

Brand：Diener / Germany, CE