Wafer annealing furnace
|
Serial Number |
Type |
Equipment Technical Specifications |
|
1 |
Furnace Dimensions |
L 1700 × H 1760 × D 850mm |
|
2 |
Reaction Chamber Dimensions |
4-8 inches |
|
3 |
Main Control Operating Temperature |
≤1150℃ |
|
4 |
Main Control Heating Rate |
Recommended ≤20°C / min |
|
5 |
Main Control Heating Element |
HRE Ring-shaped High-Temperature Resistance Wire |
|
6 |
Main Control Furnace Material |
Alumina Fiber Insulation Refractory Material |
|
7 |
Main Control Temperature Zone Length |
259+627+213 Constant Temperature Zone 600mm |
|
8 |
Temperature Control Range and Accuracy |
300~1150℃ ±1℃ |
|
9 |
Heating Rate |
Heating Rate ≤15°C / min Cooling ≤ 5°C / min |
|
10 |
Sealing method |
Stainless steel opening flange |
|
11 |
Flange structure |
Quick-opening type |
|
12 |
Temperature measuring element |
K-type thermocouple |
|
13 |
Radial temperature field distribution millivolt value |
As detailed in the introduction |
|
14 |
Flowmeter type |
3-way float flowmeter (customer-defined flow specifications) |
◎ CE certified.
◎ Brand: NOBODY