Applications:

● The Tetra 320R production system has a chamber volume of 320 liters and is PC-controlled for high-volume production (cleaning, etching, and activation): applications such as analysis, archaeology, automotive, R&D, semiconductor technology, small-batch production, plastics technology, medical engineering, microsystems technology, sensor technology, sterilization, and textile technology.

Specifications:

● Chamber: Ø 640 mm, D 1000 mm

● Chamber volume: Approximately 320 liters

● Housing:

    > Width 870 mm

    > Height 1860 mm (including feet)

    > Depth 1400 mm

● Plasma generator: 80 kHz / 0 - 3000 W

● Control: Fully PC (Windows)

● Gas supply: 2 gas channels via MFC

● Application example: Production/fully automated

● Vacuum chamber: Aluminum rails, hinged door: Ø 640 mm, D 1000 mm, maximum depth 3 meters

● Parts clamping fixture: Customized to meet customer requirements

Brand: Diener / Germany, CE