【Diener】Plasma cleaner Zepto RIE
Product Introduction
【Diener】Plasma cleaner Zepto RIE
Specification:【Diener】Plasma cleaner Zepto RIE
Features and Applications:
1. The small one - mobile, functional and cost-effective - suitable for your laboratory.
2. The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual and Basic PC control is primarily intended for the following applications:Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology, etc.
Specifications:
● Semi-automatic MHz
● Dimensions:W:425 mm H:310 mm D:450 mm
● Power supply:230 V | 16 A
● Vacuum chamber:Aluminium round, with lid Ø:190 mm H:60 mm Volume approx. 1 L
● Gas supply:2 x needle valve
● Generator:13,56 MHz | Power output 0 - 200 W
● Electrode:Electrode inside the vacuum chamber - Ø:160 mm for max. 6" wafer
● Control unit:Semi-automatic control unit
● Power supply:230 V | 50 - 60 Hz
● Pressure measurement:Pirani
● Pump:Suction capacity min. 3 m³/h
Brand: Diener/Germany, CE
Low-pressure plasma systems / Diener