【Diener】Plasma cleaner Zepto RIE

Item-Name:

【Diener】Plasma cleaner Zepto RIE

Specification:

Features and Applications:

1. The small one - mobile, functional and cost-effective - suitable for your laboratory.

2. The 2.6 litre LOW-COST PLASMA LAB SYSTEM ZEPTO with manual and Basic PC control is primarily intended for the following applications:Small batch production, Analytics (SEM, TEM), Medical engineering, Sterilising, Research and development departments, Archaeology, Textile technology, Plastics technology, etc.

Specifications:

● Semi-automatic MHz

● Dimensions:W:425 mm H:310 mm D:450 mm

● Power supply:230 V | 16 A

● Vacuum chamber:Aluminium round, with lid Ø:190 mm H:60 mm Volume approx. 1 L

● Gas supply:2 x needle valve

● Generator:13,56 MHz | Power output 0 - 200 W

● Electrode:Electrode inside the vacuum chamber - Ø:160 mm for max. 6" wafer

● Control unit:Semi-automatic control unit

● Power supply:230 V | 50 - 60 Hz

● Pressure measurement:Pirani

● Pump:Suction capacity min. 3 m³/h

Brand: Diener/Germany, CE

Low-pressure plasma systems / Diener