Applications：

The Tetra 320R production system with its chamber volume of 320 litres and PC control is used in series production (cleaning, etching and activation)：e.g. Analytics,  Archaeology, Automotive, Research and development departments, Semiconductor technology, Small batch production, Plastics Technology, Medical engineering, Micro-system technology, Sensor technology, Sterilising, Textile technology, etc.

Specifications：

● Chamber：∅ 640 mm, D 1000 mm

● Chamber volume：Ca. 320 litres                            

● Housing：

    ＞W 870 mm

    ＞H 1860 mm (with feet)

    ＞D 1400 mm

● Generator：80 kHz / 0 - 3000 W

● Controls：Full PC (Windows)

● Gas supply：2 gas channels via MFCs

● Example of use：Production / fully automatic

● Vacuum chambers：Aluminium rund, hinged door：Ø 640 mm, D 1000 mm, depth of max. 3 meters

● Parts holding fixture：according to customer requirements

Brand: Diener / Germany, CE

Low-pressure plasma systems / Diener