Features and Applications：

The Pico plasma systems can be combined in different variants in a modular manner.  Pico plasma systems are primarily used in the following sectors：Analytics (SEM, TEM), Archaeology, Automotive, Research and development departments, Semiconductor technology, Small batch production, Plastics Technology, Medical engineering, Micro-system technology, Sensor technology, Sterilising, Textile technology,etc.

Specifications：

● Chamber volume：Ca. 5 - 8 litres

● Housing：Tabel top / Stand alone

    ＞W 310 - 560 / 600 mm

    ＞H 330 - 860 / 1700 mm

    ＞D 420 - 600 / 800 mm

● Generator：

    ＞40 kHz / 0 - 200 W

    ＞100 kHz / 0 - 500 W

    ＞13,56 MHz / 0 - 300 W (Max. 200 W)

    ＞2,45 GHz / 0 - 300 W

● Controls：

    ＞Semi-automatic

    ＞Basic PC

    ＞Full PC

● Example of use：

    ＞Laboratory / small series

    ＞Production / fully automatic

● Vacuum chambers：

•     ＞Stainless steel round with cover：Ø 150 mm, D 320 mm
•     ＞Stainless steel rectangular with hinged door：B 160 mm x H 160 mm x D 325 mm
•     ＞Aluminium rectangular with hinged door：B 160 mm x H 160 mm x D 325 mm
•     ＞quartz glass (UHP) round with cover or hinged door：Ø 130 mm, D 300 mm
•     ＞Borosilikatglass (HP) round with cover or hinged door：Ø 130 mm, D 300 mm

Brand: Diener/Germany, CE

Low-pressure plasma systems / Diener